By T. Itoh (Eds.)

ISBN-10: 0444599088

ISBN-13: 9780444599087

ISBN-10: 0444872809

ISBN-13: 9780444872807

This quantity presents brand new details at the experimental, theoretical and technological elements of movie progress assisted by means of ion beams. Ion beam assisted movie progress is among the premier options in helping the expansion of top quality skinny sturdy movies in a managed manner. additionally, ion beams play a dominant position cut back the expansion temperature of skinny motion pictures of excessive melting element fabrics. In Read more...

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Wu, SPIE 409,Technical Issues in Infrared Detectors and Arrays, (1983). H. Cornely, L. Suchow, T. Gabara and P. Diodato, IEEE Trans. Electron Devices Ed-27 (1980) 29. H. Cornely, L. Suchow, N. Mulligan, T. Chan and R. Haq, J. Vac. Sei. , 18(2) (1981) 190. [57] R. F. Sputtered (Hg. Cd )Te Thin Films, MSEE thesis, NJIT Oct. 1982. 'x x [58] C. Wu, The Dependence of the Conduction Properties of Annealed Films of (Hg~ o»Cdn o) ~^e o n Sputter-deposition and Annealing Parameters, MSEE thesis, NOIT Oct.

It has been suggested that the presence of Mn trends to stabilize the 6H phase[22]. Fig. 3 SEM cross section microphotograph of ZnS:Mn film deposited on an ITO-coated glass substrate[19]. ) 60 Fig. 4 X-ray diffraction on ZnS:Mn film deposited on substrate (T$= 110 °C) (a) enlarged pattern between 2Θ 29° (b)[19]. 4 shows the X-ray diffraction patterns deposited on a glass substrate at T to be about 8 M m . at = 110 As represented in Fig. C. 5 ° and the (102) and (103) lines which are deduced from phase can be seen, line now but the (220) line was not present.

3, bias voltage It can be seen that the critical bias changes with target x value and also slightly with substrate type. was also found that the critical bias voltage becomes more positive the substrate as temperature or deposition rate are increased (which in films makes them more n-type). It either unbiased The decrease in carrier concentration near the 23 's -30 -20 0 Fig. 3 Effect of substrate bias and deposition sonditions on carrier concentration. Substrate : BaF 0 +10 BIAS VOLTAGE (volt·) T 2121; + 5 V Bias n - t y p e T 2119; - 1 0 V Bias n - t y p e T 2118; +10V Bias p - t y p e B a F 0 Substrate J I I i [ TEMPERATURE] ' L_i_ 10 0 3 / 2 T ( K" 1 ) Fig.

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Ion Beam Assisted Film Growth by T. Itoh (Eds.)

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